Abstract: Our unit purchased the Hitachi X-650 Scanning Electron Microscope from Japan in 1982 and has been working for 24 years. The instrument has a high utilization rate and plays an important role in the teaching and scientific research of our school. In the course of use, some failures occurred in the instrument successively, all of which were resolved by our technicians. The following is a summary of the recent fault repair experience for the reference of users with the same model of electron microscope
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